Low vibration and zero maintenance
On Chamber Solutions
Low Vibration and Zero Maintenance
If you need consistent, reliable performance with zero maintenance, our range of STP Maglev Turbomolecular Pumps sets the standard. The rotor is entirely suspended by magnetic bearings – perfect for applications demanding high up-time, hydrocarbon-free pumping, minimal maintenance and low vibration.
Advanced High Throughput Series
The Advanced series offers high levels of throughput, perfect for your semiconductor etch and CVD processes:
- Compact footprint
- Throughput speeds from 300 l/s to 4500 l/s
- Throughput up to 6 slm and increased H2, N2 and Ar performances.