STP Maglev Turbomolecular Pumps

Low vibration and zero maintenance

STP Maglev Turbomolecular Pumps

On Chamber Solutions

Advanced High Throughput Series

The Advanced series offers high levels of throughput, perfect for your semiconductor etch and CVD processes:

      • Compact footprint
      • Throughput speeds from 300 l/s to 4500 l/s
      • Throughput up to 6 slm and increased H2, N2 and Ar performances.

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