On-board Cryopumps

World standard for reliability and performance

On-board Cryopumps

Accelerate integration and improve system operation

Delivering superior up-time, On-Board cryopumps and consistent performance, with fully integrated controls and supporting peripherals, deliver superior up-time to increase overall tool productivity and up-time.

Key Features

        • Fast Regen™ capability that extends cryopump performance between regenerations
        • Simultaneous regeneration capability, enabled by networking your cryopumps, that speeds overall system regeneration
        • An embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability
        • Sophisticated software and easy-to-use graphical user interfaces to significantly improve performance and operation

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