Cryopumps

Superior performance and increased tool uptime

16. Cryopumps

World standard for reliability and performance

From our single cryopumps used in a spectrum of high technology research applications to our sophisticated cryopump systems used in the manufacturing of semiconductor, flat panel, and optical devices, CTI-Cryogenics sets the world standard for cryogenic high-vacuum technology.

Key Features

      • Fast Regen™ capability that extends cryopump performance between regenerations
      • Simultaneous regeneration capability, enabled by networking your cryopumps, that speeds overall system regeneration
      • An  embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability
      • Sophisticated software and easy-to-use graphical user interfaces to significantly improve performance and operation.

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