On-board Cryopumps
World standard for reliability and performance
Accelerate integration and improve system operation
Edwards CTI-Cryogenics On-Board vacuum pumps speed up integration and improve system operation – known as the world standard for reliability and performance.
Delivering superior up-time, On-Board cryopumps and consistent performance, with fully integrated controls and supporting peripherals, deliver superior up-time to increase overall tool productivity and up-time.
Key Features
- Fast Regen™ capability that extends cryopump performance between regenerations
- Simultaneous regeneration capability, enabled by networking your cryopumps, that speeds overall system regeneration
- An embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability
- Sophisticated software and easy-to-use graphical user interfaces to significantly improve performance and operation
