Cryopumps
Superior performance and increased tool uptime
World standard for reliability and performance
CTI-Cryogenics is the global leader in cryogenic high vacuum technology. CTI builds a broad array of cryopumps and cryopump systems designed to deliver exceptional performance, reliability and productivity.
From our single cryopumps used in a spectrum of high technology research applications to our sophisticated cryopump systems used in the manufacturing of semiconductor, flat panel, and optical devices, CTI-Cryogenics sets the world standard for cryogenic high-vacuum technology.
Key Features
- Fast Regen™ capability that extends cryopump performance between regenerations
- Simultaneous regeneration capability, enabled by networking your cryopumps, that speeds overall system regeneration
- An embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability
- Sophisticated software and easy-to-use graphical user interfaces to significantly improve performance and operation.